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"Advanced FIB sample preparation techniques for high resolution TEM ..."

Michél Simon-Najasek et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.101

access: closed

type: Journal Article

metadata version: 2024-05-07

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Michél Simon-Najasek, Susanne Hübner, Frank Altmann, Andreas Graff:
Advanced FIB sample preparation techniques for high resolution TEM investigations of HEMT structures. Microelectron. Reliab. 54(9-10): 1785-1789 (2014)

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