"Monolithic integrable capacitive humidity sensing method for material ..."

Andreas Rückerl et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.038

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type: Journal Article

metadata version: 2020-02-22

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Andreas Rückerl, Sophia Huppmann, Roland Zeisel, Simeon Katz:
Monolithic integrable capacitive humidity sensing method for material characterization of dielectric thin films. Microelectron. Reliab. 54(9-10): 1741-1744 (2014)

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