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"Light emission from Si/SiO₂ superlattices fabricated by RPECVD."

R. Rölver et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.025

access: closed

type: Journal Article

metadata version: 2023-11-11

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R. Rölver, O. Winkler, Michael Först, B. Spangenberg, H. Kurz:
Light emission from Si/SiO₂ superlattices fabricated by RPECVD. Microelectron. Reliab. 45(5-6): 915-918 (2005)

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