"Evaluation of scanning capacitance microscopy sample preparation by ..."

Nicolas Rodriguez et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.019

access: closed

type: Journal Article

metadata version: 2023-08-03

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  - https://dblp.org/rec/journals/mr/RodriguezAGHGP06
Nicolas Rodriguez, Jérôme Adrian, Catherine Grosjean, Gérald Haller, Christophe Girardeaux, Alain Portavoce:
Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectron. Reliab. 46(9-11): 1554-1557 (2006)

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