"Static fault localization of subtle metallization defects using near ..."

Alfred C. T. Quah et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.04.010

access: closed

type: Journal Article

metadata version: 2021-12-21

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Alfred C. T. Quah, Dayanand Nagalingam, Seung Je Moon, Edy Susanto, Ghim Boon Ang, Soh Ping Neo, Jeffrey Lam, Zhihong Mai:
Static fault localization of subtle metallization defects using near infrared photon emission microscopy. Microelectron. Reliab. 73: 76-91 (2017)

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