"LOCOS induced stress effects on SOI bipolar devices."

Stefania Privitera et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.039

access: closed

type: Journal Article

metadata version: 2020-02-22

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Stefania Privitera, R. Modica, V. Cerantonio, Giorgio Fallica, G. Pappalardo:
LOCOS induced stress effects on SOI bipolar devices. Microelectron. Reliab. 47(4-5): 802-805 (2007)

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