"Contact degradation due to material transfer in MEM switches."

Alexis Peschot et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.044

access: closed

type: Journal Article

metadata version: 2023-09-30

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Alexis Peschot, Christophe Poulain, Frédéric Souchon, Pierre-Louis Charvet, Nelly Bonifaci, Olivier Lesaint:
Contact degradation due to material transfer in MEM switches. Microelectron. Reliab. 52(9-10): 2261-2266 (2012)

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