"Electrical properties of thin RF sputtered Ta2O5 ..."

M. Pecovska-Gjorgjevich, Nenad Novkovski, Elena Atanassova (2003)

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DOI: 10.1016/S0026-2714(02)00326-8

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type: Journal Article

metadata version: 2021-12-24

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M. Pecovska-Gjorgjevich, Nenad Novkovski, Elena Atanassova:
Electrical properties of thin RF sputtered Ta₂O₅ films after constant current stress. Microelectron. Reliab. 43(2): 235-241 (2003)

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