"Reliability improvement in microstructures by reducing the impact velocity ..."

Giorgio De Pasquale et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.028

access: closed

type: Journal Article

metadata version: 2020-02-22

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Giorgio De Pasquale, Marco Barbato, Valentina Giliberto, Gaudenzio Meneghesso, Aurelio Somà:
Reliability improvement in microstructures by reducing the impact velocity through electrostatic force modulation. Microelectron. Reliab. 52(9-10): 1808-1811 (2012)

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