"Design and process related MIM cap reliability improvement."

Justin Parke et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.09.026

access: closed

type: Journal Article

metadata version: 2020-02-22

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Justin Parke, Randy Lewis, Kathy Ha, Harlan Cramer, Harold Hearne:
Design and process related MIM cap reliability improvement. Microelectron. Reliab. 55(12): 2516-2521 (2015)

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