"Reliability of thin ZrO₂ gate dielectric layers."

Robert O'Connor et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.02.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Robert O'Connor, Greg Hughes, Thomas Kauerauf, Lars-Åke Ragnarsson:
Reliability of thin ZrO₂ gate dielectric layers. Microelectron. Reliab. 51(6): 1118-1122 (2011)

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