"Sample preparation techniques for physical analysis of VLSIs."

S. Nakajima et al. (2004)

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DOI: 10.1016/J.MICROREL.2003.08.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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S. Nakajima, S. Nakamura, T. Ueki, T. Sakai:
Sample preparation techniques for physical analysis of VLSIs. Microelectron. Reliab. 44(3): 449-458 (2004)

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