"A low energy FIB processing, repair, and test system."

Katsuyoshi Miura et al. (2003)

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DOI: 10.1016/S0026-2714(03)00286-5

access: closed

type: Journal Article

metadata version: 2020-02-22

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Katsuyoshi Miura, Tomoyuki Kobatake, Koji Nakamae, Hiromu Fujioka:
A low energy FIB processing, repair, and test system. Microelectron. Reliab. 43(9-11): 1627-1631 (2003)

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