"Electrical and structural properties of hafnium silicate thin films."

Ivona Z. Mitrovic et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.065

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ivona Z. Mitrovic, Octavian Buiu, Steve Hall, C. Bungey, T. Wagner, W. Davey, Y. Lu:
Electrical and structural properties of hafnium silicate thin films. Microelectron. Reliab. 47(4-5): 645-648 (2007)

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