"A new finite element approach to stress analysis in microfabrication ..."

Slobodan Mijalkovic (2001)

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DOI: 10.1016/S0026-2714(01)00023-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Slobodan Mijalkovic:
A new finite element approach to stress analysis in microfabrication technology. Microelectron. Reliab. 41(6): 837-845 (2001)

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