"Dielectric charging effects in floating electrode MEMS capacitive switches."

Loukas Michalas et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.07.024

access: closed

type: Journal Article

metadata version: 2022-10-02

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Loukas Michalas, Matroni Koutsoureli, E. Papandreou, Flavio Giacomozzi, George J. Papaioannou:
Dielectric charging effects in floating electrode MEMS capacitive switches. Microelectron. Reliab. 55(9-10): 1891-1895 (2015)

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