"A study of field emission process in electrostatically actuated MEMS switches."

Loukas Michalas et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.019

access: closed

type: Journal Article

metadata version: 2022-10-02

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Loukas Michalas, Anurag Garg, Ayyaswamy Venkattraman, Matroni Koutsoureli, Alina A. Alexeenko, Dimitrios Peroulis, George J. Papaioannou:
A study of field emission process in electrostatically actuated MEMS switches. Microelectron. Reliab. 52(9-10): 2267-2271 (2012)

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