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"Capacitive RF MEMS analytical predictive reliability and lifetime ..."
Mohamed Matmat et al. (2009)
- Mohamed Matmat, Fabio Coccetti, Antoine Marty, Robert Plana, Christophe Escriba, Jean-Yves Fourniols, Daniel Estève:
Capacitive RF MEMS analytical predictive reliability and lifetime characterization. Microelectron. Reliab. 49(9-11): 1304-1308 (2009)
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