"Failure analysis and detection methodology for capacitive RF-MEMS switches ..."

Nuria Torres Matabosch et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.099

access: closed

type: Journal Article

metadata version: 2021-08-18

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Nuria Torres Matabosch, Fabio Coccetti, Mehmet Kaynak, Beatrice Espana, Bernd Tillack, Jean-Louis Cazaux:
Failure analysis and detection methodology for capacitive RF-MEMS switches based on BEOL BiCMOS process. Microelectron. Reliab. 53(9-11): 1659-1662 (2013)

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