"Towards the use of the conformal-evaporated-film-by-rotation technique in ..."

Raúl José Martín-Palma, Carlo G. Pantano, Akhlesh Lakhtakia (2009)

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DOI: 10.1016/J.MICROREL.2009.01.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Raúl José Martín-Palma, Carlo G. Pantano, Akhlesh Lakhtakia:
Towards the use of the conformal-evaporated-film-by-rotation technique in fabricating microelectronic circuits and microsystems. Microelectron. Reliab. 49(4): 460-462 (2009)

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