"Study on non-contact current path formation using charged particle beams."

J. Ma et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.089

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type: Journal Article

metadata version: 2022-03-23

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J. Ma, Y. Fujimura, M. Utsumi, S. Tomonaga, Yoji Mashiko:
Study on non-contact current path formation using charged particle beams. Microelectron. Reliab. 64: 326-329 (2016)

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