"Electron beam induced carbon deposition using hydrocarbon contamination ..."

J. S. Luo et al. (2010)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2010.07.046

access: closed

type: Journal Article

metadata version: 2024-05-06

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/LuoSHHR10
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/LuoSHHR10
J. S. Luo, C. S. Sung, W. S. Hsu, L. Y. Huang, Jeremy D. Russell:
Electron beam induced carbon deposition using hydrocarbon contamination for XTEM analysis. Microelectron. Reliab. 50(9-11): 1446-1450 (2010)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.