"Hysteresis effect on traps of Si3N4 sensing ..."

Cheng-En Lue et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.026

access: closed

type: Journal Article

metadata version: 2023-09-30

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Cheng-En Lue, Jer-Chyi Wang, Dorota G. Pijanowska, Chia-Ming Yang, I-Shun Wang, Huang-Chia Lee, Chao-Sung Lai:
Hysteresis effect on traps of Si₃N₄ sensing membranes for pH difference sensitivity. Microelectron. Reliab. 50(5): 738-741 (2010)

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