"Spherical aberration correction in aplanatic solid immersion lens imaging ..."

Yang Lu et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.026

access: closed

type: Journal Article

metadata version: 2023-09-30

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Yang Lu, Euan Ramsay, Christopher R. Stockbridge, Abdulkadir Yurt, F. Hakan Köklü, Thomas G. Bifano, M. Selim Ünlü, Bennett B. Goldberg:
Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror. Microelectron. Reliab. 52(9-10): 2120-2122 (2012)

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