"Focused high- and low-energy ion milling for TEM specimen preparation."

Andriy Lotnyk et al. (2015)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2015.07.005

access: closed

type: Journal Article

metadata version: 2024-06-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/LotnykPRGFBTR15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/LotnykPRGFBTR15
Andriy Lotnyk, D. Poppitz, U. Ross, J. W. Gerlach, Frank Frost, S. Bernütz, E. Thelander, B. Rauschenbach:
Focused high- and low-energy ion milling for TEM specimen preparation. Microelectron. Reliab. 55(9-10): 2119-2125 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.