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"Design, modeling and analysis of highly reliable capacitive ..."

Kai Li, Wenyuan Chen, Weiping Zhang (2012)

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DOI: 10.1016/J.MICROREL.2012.02.009

access: closed

type: Journal Article

metadata version: 2022-10-02

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Kai Li, Wenyuan Chen, Weiping Zhang:
Design, modeling and analysis of highly reliable capacitive microaccelerometer based on circular stepped-plate and small-area touch mode. Microelectron. Reliab. 52(7): 1373-1381 (2012)

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