"Influence of substrate temperature to prepare (1 0 3) oriented AlN films."

Maw-Shung Lee et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.06.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Maw-Shung Lee, Sean Wu, Shih-Bin Jhong, Kuan-Ting Liu, Ruyen Ro, Chia-Chi Shih, Zhi-Xun Lin, Kang-I Chen, Shou-Chang Cheng:
Influence of substrate temperature to prepare (1 0 3) oriented AlN films. Microelectron. Reliab. 50(12): 1984-1987 (2010)

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