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"Improved reliability of large-sized a-Si thin-film-transistor by back ..."

Hao-Chieh Lee, Kuei-Shu Chang-Liao, Yan-Lin Li (2015)

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DOI: 10.1016/J.MICROREL.2015.09.001

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hao-Chieh Lee, Kuei-Shu Chang-Liao, Yan-Lin Li:
Improved reliability of large-sized a-Si thin-film-transistor by back channel treatment in H₂. Microelectron. Reliab. 55(11): 2178-2182 (2015)

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