"Observation of halo implant from the drain side reaching the source side ..."

W. S. Lau et al. (2010)

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DOI: 10.1016/J.MICROREL.2009.12.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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W. S. Lau, Peizhen Yang, Eng Hua Lim, Yee Ling Tang, Seow Wei Lai, V. L. Lo, S. Y. Siah, L. Chan:
Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors. Microelectron. Reliab. 50(3): 346-350 (2010)

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