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"Evidence of chlorine ion penetration in InP/InAsP quantum well structures ..."
Jean-Pierre Landesman et al. (2015)
- Jean-Pierre Landesman, Christophe Levallois
, Juan Jiménez, Frédéric Pommereau, Yoan Léger, Alexandre Beck, Thomas Delhaye, Alfredo Torres, Cesare Frigeri, Ahmed Rhallabi
:
Evidence of chlorine ion penetration in InP/InAsP quantum well structures during dry etching processes and effects of induced-defects on the electronic and structural behaviour. Microelectron. Reliab. 55(9-10): 1750-1753 (2015)
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