"Effects of RF power on the structural, optical and electrical properties ..."

Shou-Yi Kuo et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.042

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type: Journal Article

metadata version: 2024-10-06

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Shou-Yi Kuo, Kou-Chen Liu, Fang-I Lai, Jui-Fu Yang, Wei-Chun Chen, Ming-Yang Hsieh, Hsin-I Lin, Woei-Tyng Lin:
Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films. Microelectron. Reliab. 50(5): 730-733 (2010)

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