"Metallization defect detection in 3D integrated components using scanning ..."

Eva Kozic et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.07.075

access: open

type: Journal Article

metadata version: 2020-10-26

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Eva Kozic, René Hammer, Jördis Rosc, Bernhard Sartory, Joerg Siegert, Franz Schrank, Roland Brunner:
Metallization defect detection in 3D integrated components using scanning acoustic microscopy and acoustic simulations. Microelectron. Reliab. 88-90: 262-266 (2018)

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