"Dielectric charging phenomena in diamond films used in RF MEMS capacitive ..."

Matroni Koutsoureli et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.053

access: closed

type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, Athanasios Zevgolatis, Samuel Saada, Christine Mer-Calfati, Loukas Michalas, George J. Papaioannou, Philippe Bergonzo:
Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches: The effect of film thickness. Microelectron. Reliab. 64: 660-664 (2016)

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