"Electrical properties of SiNx films with embedded CNTs for MEMS ..."

Matroni Koutsoureli et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.07.041

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type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, George Stavrinidis, Dimitrios Birmpiliotis, George Konstantinidis, George J. Papaioannou:
Electrical properties of SiN_x films with embedded CNTs for MEMS capacitive switches. Microelectron. Reliab. 76-77: 614-618 (2017)

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