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"Electrical properties of SiNx films with embedded CNTs for MEMS ..."
Matroni Koutsoureli et al. (2017)
- Matroni Koutsoureli, George Stavrinidis, Dimitrios Birmpiliotis, George Konstantinidis, George J. Papaioannou:
Electrical properties of SiNx films with embedded CNTs for MEMS capacitive switches. Microelectron. Reliab. 76-77: 614-618 (2017)
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