"Properties of contactless and contacted charging in MEMS capacitive switches."

Matroni Koutsoureli et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.057

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type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, Loukas Michalas, P. Martins, E. Papandreou, A. Leuliet, S. Bansropun, George J. Papaioannou, A. Ziaei:
Properties of contactless and contacted charging in MEMS capacitive switches. Microelectron. Reliab. 53(9-11): 1655-1658 (2013)

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