"Current imaging, EBIC/EBAC, and electrical probing combined for fast and ..."

Stephan Kleindiek et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.024

access: closed

type: Journal Article

metadata version: 2020-02-22

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Stephan Kleindiek, Klaus Schock, Andreas Rummel, Michael Zschornack, Pascal Limbecker, Andreas Meyer, Matthias Kemmler:
Current imaging, EBIC/EBAC, and electrical probing combined for fast and reliable in situ electrical fault isolation. Microelectron. Reliab. 64: 313-316 (2016)

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