"Intrinsic stress fracture energy measurements for PECVD thin films in the ..."

Sean W. King, J. A. Gradner (2009)

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DOI: 10.1016/J.MICROREL.2009.04.006

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type: Journal Article

metadata version: 2020-02-22

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Sean W. King, J. A. Gradner:
Intrinsic stress fracture energy measurements for PECVD thin films in the SiO_xC_yN_z: H system. Microelectron. Reliab. 49(7): 721-726 (2009)

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