"Reliability characteristics of high-k dielectrics."

Young-Hee Kim, Jack C. Lee (2004)

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DOI: 10.1016/J.MICROREL.2003.10.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Young-Hee Kim, Jack C. Lee:
Reliability characteristics of high-k dielectrics. Microelectron. Reliab. 44(2): 183-193 (2004)

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