"Study of thinned Si wafer warpage in 3D stacked wafers."

Youngrae Kim, Sung-Keun Kang, Sarah Eunkyung Kim (2010)

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DOI: 10.1016/J.MICROREL.2010.05.006

access: closed

type: Journal Article

metadata version: 2022-06-23

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Youngrae Kim, Sung-Keun Kang, Sarah Eunkyung Kim:
Study of thinned Si wafer warpage in 3D stacked wafers. Microelectron. Reliab. 50(12): 1988-1993 (2010)

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