"Fabrication of suspended thin film resonator for application of RF ..."

Hyun Ho Kim et al. (2004)

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DOI: 10.1016/J.MICROREL.2003.09.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hyun Ho Kim, Byeong Kwon Ju, Yun Hi Lee, Si Hyung Lee, Jeon Kook Lee, Soo Won Kim:
Fabrication of suspended thin film resonator for application of RF bandpass filter. Microelectron. Reliab. 44(2): 237-243 (2004)

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