"Effect of the functionalization process on the performance of SiGe MEM ..."

Ahmad Khaled et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.010

access: closed

type: Journal Article

metadata version: 2021-03-10

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Ahmad Khaled, Moatassim Raoof, Vladimir Cherman, Karoline Jans, Mohammad Abbas, Shaker Ebrahim, Goerge Bryce, Peter Verheyen, Ann Witvrouw, Ingrid De Wolf:
Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing. Microelectron. Reliab. 52(9-10): 2272-2277 (2012)

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