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"Determination of electrical and mechanical parameters in capacitive MEMS ..."
Stanislaw Kalicinski et al. (2011)
- Stanislaw Kalicinski, Tomasz Bieniek, Pawel Janus, Piotr Grabiec:
Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements. Microelectron. Reliab. 51(7): 1192-1197 (2011)
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