"Novel techniques for dopant contrast analysis on real IC structures."

Joerg Jatzkowski, Michél Simon-Najasek, Frank Altmann (2012)

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DOI: 10.1016/J.MICROREL.2012.06.113

access: closed

type: Journal Article

metadata version: 2024-05-07

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Joerg Jatzkowski, Michél Simon-Najasek, Frank Altmann:
Novel techniques for dopant contrast analysis on real IC structures. Microelectron. Reliab. 52(9-10): 2098-2103 (2012)

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