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"Enhancement of RF-MEMS switch reliability through an active anti-stiction ..."

Jacopo Iannacci et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.108

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jacopo Iannacci, A. Repchankova, Alessandro Faes, Augusto Tazzoli, Gaudenzio Meneghesso, Gian-Franco Dalla Betta:
Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism. Microelectron. Reliab. 50(9-11): 1599-1603 (2010)

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