"Electrical characteristics of nMOSFETs fabricated on hybrid orientation ..."

Po-Chin Huang et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.039

access: closed

type: Journal Article

metadata version: 2020-02-22

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Po-Chin Huang, San Lein Wu, Shoou Jinn Chang, Yao Tsung Huang, Chien Ting Lin, Mike Ma, Osbert Cheng:
Electrical characteristics of nMOSFETs fabricated on hybrid orientation substrate with amorphization/templated recrystallization method. Microelectron. Reliab. 50(5): 662-665 (2010)

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