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"Effect of additive N2 and Ar gases on surface smoothening and ..."
W. Heo, Nae-Eung Lee (2012)
- W. Heo, Nae-Eung Lee:
Effect of additive N2 and Ar gases on surface smoothening and fracture strength of Si wafers during high-speed chemical dry thinning. Microelectron. Reliab. 52(2): 412-417 (2012)
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