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"Effect of annealing on the properties of low-k nanoporous SiO2 ..."

Z. W. He et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.05.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Z. W. He, X. Q. Liu, D. Y. Xu, Y. Y. Wang:
Effect of annealing on the properties of low-k nanoporous SiO₂ films prepared by sol-gel method with catalyst HF. Microelectron. Reliab. 46(12): 2062-2066 (2006)

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