"Bias-temperature stress of Al on porous low-k dielectrics."

Ming He et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.03.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ming He, Huafang Li, Pei-I Wang, Toh-Ming Lu:
Bias-temperature stress of Al on porous low-k dielectrics. Microelectron. Reliab. 51(8): 1342-1345 (2011)

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