"Simultaneous IC-internal voltage and current measurements via a multi ..."

Claus Hartmann et al. (2002)

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DOI: 10.1016/S0026-2714(02)00226-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Claus Hartmann, Rainer Weber, Wolfgang Mertin, Erich Kubalek, Anne-Dorothea Müller, Michael Hietschold:
Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope. Microelectron. Reliab. 42(9-11): 1759-1762 (2002)

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