"Modification of porous ultra-low K dielectric by electron-beam curing."

Cyril Guedj et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.026

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type: Journal Article

metadata version: 2024-10-06

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Cyril Guedj, G. Imbert, E. Martinez, Christophe Licitra, Névine Rochat, V. Arnal:
Modification of porous ultra-low K dielectric by electron-beam curing. Microelectron. Reliab. 47(4-5): 764-768 (2007)

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